TCSI1 Critically Assessed Systems

Generally, only the diamond phase and Si-rich corner is critically assessed in each Si-containing binary system. The BINARY_DIAGRAM module is applicable in Si containing binary systems to calculate the impurity solubility in silicon. The solubility in ternary and higher order systems can be calculated by Thermo‑Calc through the extrapolation from binary systems.

• The solubility of impurity X in diamond Si of all Si-X binaries is assessed.
• Besides the diamond phase, at least the liquid and the corresponding stable silicide phase with highest Si content is included in each Si-X binary, except for X = As, Ga and Sb.
• Two assessed Si-free binaries i.e. Al-B and Al-P are included.
• The Si-Al-C ternary is included.
• The following 17 binaries (Si-M1) using the excess Gibbs energy of the diamond phase transited from Yoshikawa et al [2010Yos], where M1 = Ag, Al, Au, B, Bi, Co, Cr, Cu, Fe, Ga, In, Mn, Ni, Sb, Sn, Ti, Zn.
• The diamond in the following 13 binaries (Si-M2) was optimized to reproduce the M2 solubility in Si published in Tang et al. [2009Tan], where M2 = As, Ca, Li, Mg, Mo, N, Na, O, P, S, V, W, Zr.
• The thermodynamic description of the Ge-Si binary was taken from [1992Ber].
• The Si-C binary was reassessed in 2015.